FEATURES
Compact Design
Low profile design.
High Precision Stage
±0.2um Repeatability and ±1um Absolute Accuracy
High Precision Ground Ballscrew or Ironless Linear Motor
Option for selection with ballscrew or linear motor.
Cross Roller Bearing
Using high stiffness crossed roller bearing.
APPLICATIONS
Semiconductor inspection machine, precision machining machines, laser cutting machines, Automatic equipment, High speed transfer equipment, Measuring equipment.